[18a-M_103-1~13] 8.1 Plasma production and diagnostics

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-M_103-11] Detection of active species behavior in nitrogen plasma using plasma indicators

〇Shoma Kano¹, Yu Yamakawa¹, Seisaku Ohshiro¹, Kazuhiro Uneyama¹ (1.SAKURA COLOR PRODUCTS CORPORATION)

Keywords:

plasma indicator,nitrogen plasma,active species behavior

We propose the “Plasma Indicator” as an evaluation tool for plasma process, which changes color upon reaction to radicals or ions. In this study, we investigated the behavior of active species in remote microwave nitrogen plasma by the color changes of Plasma Indicators with inorganic colorants. The indicators exhibited a black color attributed to ions in the remote plasma source unit and a yellow color attributed to radicals on the sample stage, suggesting a spatial variation in the ion-to-radical ratio. We will also report on the results of optical emission spectroscopy about nitrogen plasma and structural analysis of the indicators.