Presentation Information

[18a-M_103-7]Design of a collective Thomson scattering measurement system for mid-infrared laser-produced EUV source plasmas

〇(B)Hyeonjoon Jang1, Kentaro Tomita1 (1.Hokkaido Univ.)

Keywords:

collective Thomson scattering,EUV light source plasma,inverse-bremsstrahlung

In recent years, there has been active effort to replace the excitation laser for EUV light source plasmas from carbon dioxide lasers (wavelength 10.6 μm) to mid-infrared lasers with 2 μm band, and in this research we are proceeding with the construction of a collective Thomson scattering system to measure electron temperature and electron density in response to this. In particular, we are experimentally investigating the effects of laser disturbance associated with higher electron density by shorter wavelengths and designing a spectroscopic system with a probe laser wavelength of 266 nm.