Presentation Information
[18a-PA1-2]Morphological Analysis of Semiconductor Microstructures Using Persistent Homology and Elliptic Fourier Analysis
〇Keisho Higa1, Kazuhiro Hashiride1, Chihiro Ito1, Noriko Nitta1, Ippei Obayashi2 (1.Kochi Univ. Tech., 2.Okayama Univ.)
Keywords:
Persistent Homology,Elliptic Fourier Analysis