[18a-PB1-1~32] 12.3 Functional Materials and Novel Devices

[18a-PB1-10] Fabrication and characterization of PMMA ion gel thin film

〇Mayuko Warabino¹, Kazuaki Furukawa¹ (1.Meisei Univ.)

Keywords:

ion gel

Ion gels are useful as gate electrode materials for electronic devices, and PMMA is known as a resist material for electron beam lithography. By forming PMMA ion gels into thin films, it may be possible to develop resist materials with new functionalities. This study aimed to fabricate and evaluate PMMA ion gel thin films. The feasibility of thin film formation was investigated by varying the ion gel raw material, spin coating speed, and UV exposure time.