[18a-PB2-1~21] 12.7 Biomedical Engineering and Biochips

[18a-PB2-16] Comparative study of Parylene, OTS, and HMDS coatings on Light-Addressable Potentiometric Sensors

〇Anna Matsumoto¹, Yudai Hemmi², Hiroyuki Matsui², Kuniaki Nagamine², Ko-ichiro Miyamoto³, Tatsuo Yoshinobu³, Carl Frederik Werner¹ (1.KIT, 2.Yamagata Univ., 3.Tohoku Univ.)

Keywords:

Chemical sensor,Ion sensor,Light-Addressable Potentiometric Sensor

This study, compares the effectiveness of Parylene, OTS, and HMDS as intermediate layers in order to improve the adhesion between a Light-Addressable Potentiometric Sensor (LAPS) chip and an Ion-Selective Membranes (ISM). Devices incorporating Parylene exhibited excellent sensitivity and linearity in the detection of potassium and sodium ions, achieving high selectivity by suppressing pH cross-sensitivity. This is attributed to the high adhesion and other properties of Parylene, suggesting its potential to contribute to the performance enhancement and new application development of LAPS.