Presentation Information
[18a-PB3-7]Charging Effect in Soft X-ray Appearance Potential Spectroscopy of CeOx thin films
〇Takayuki Kashiwakura1, Taichi Yamaguchi1, Toshiaki Goto1 (1.Utsunomiya Univ.)
Keywords:
appearance potential spectroscopy,charging effect,insulating thin film
We performed Soft X-ray Appearance Potential Spectroscopy (SXAPS) at the Ce M4,5 absorption edges for samples in which an insulating CeOx thin film was formed on a conductive substrate, and investigated the effects of charging observed in the spectra. In the spectrum measured for a sample in which a 20 nm Al thin film was deposited on the CeOx thin film, the peak structures were shifted to lower energy by approximately 4.5 eV compared to the case without the Al thin film, confirming the suppression of charging by the conductive cover layer.