[18a-WL1_201-1~8] 6.4 Thin films and New materials

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[18a-WL1_201-6] Semimetallic behavior as the origin of low TCR characteristics in Cr-N thin films for highly sensitive strain sensors

〇Eiji Niwa¹, Yoshihiro Sasaki¹, Rie Umetsu² (1.DENJIKEN, 2.Tohoku Univ. IMR)

Keywords:

Cr-N thin film,Temperature coefficient of resistance,Semimetal

Cr-N thin films are novel, highly sensitive strain sensor materials with excellent properties, including a large gauge factor of 12–16 and the ability to control the temperature coefficient of resistance (TCR) to nearly zero. The large gauge factor is due to the antiferromagnetism of Cr, but the origin of the low TCR is unclear. Therefore, we investigated the resistance behavior of Cr-N thin films as they were subjected to temperature changes from cryogenic to room temperature. The results showed resistance change behavior similar to that of Cr-Al, which has been reported to be a semimetal. The low TCR of Cr-N thin films is thought to be due to this semimetallic behavior.