[18a-WL2_301-1~10] 3.8 Terahertz technologies

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[18a-WL2_301-7] [The 59th Young Scientist Presentation Award Speech] Analysis of Anisotropic Surface Conduction Thin Films by Terahertz Ellipsometry

〇Akihiro Okamoto¹, Masaya Nagai¹, Masaaki Ashida¹, Takashi Fujii² (1.Grad. Sch. Eng. Sci., The University of Osaka, 2.Nippo Precision Co., Ltd)

Keywords:

semiconductor,Ellipsometry,Terahertz

In this presentation, terahertz magneto-optical ellipsometry incorporating magnetic field modulation is employed to perform measurements on GaAs thin films, and the resulting data are analyzed. A simple analysis model is proposed, in which multiple reflections in the thin film are treated as a surface current on the substrate, enabling the direct extraction of the optical conductivity from the complex reflectance. The extracted optical conductivity is shown to be consistent with DC conductivity and Hall measurements, thereby establishing the validity of the proposed model. Possible applications of the model will be discussed.