Presentation Information
[18a-WL2_401-6]Large Non-Volatile and Reversible Phase Shift in SiN Waveguide via Si Content Control
〇(D)Sohei Ogasawara1,2, Yuriko Maegami1, Guangwei Cong1, Rai Kou1, Toshihiro Narushima1, Tai Tsuchizawa1, Hitoshi Kawashima1, Noritsugu Yamamoto1, Madoka Ono2, Koji Yamada1 (1.AIST, 2.Tohoku Univ.)
Keywords:
SiN,Phase shifter
