[18p-S2_202-1~10] KS.2 Quantum Information Engineering Group

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[18p-S2_202-10] Fabrication and Evaluation of TiN Thin Film Resonators on C Plane Sapphire Substrates

〇Satoru Mima¹, Hirotaka Terai¹, Kazuyo Takaki¹, Shigehito Miki¹ (1.NICT)

Keywords:

superconductor,superconducting qubits

In superconducting qubits, reducing material induced losses is crucial. In this study, TiN thin film resonators were fabricated on C plane sapphire substrates with the aim of reducing substrate dielectric losses, and their properties were evaluated at the single photon level. X ray diffraction measurements confirmed epitaxial growth of TiN and the presence of in plane domain structures. Based on measurements performed in a dilution refrigerator, the characteristics of TiN thin film resonators on C plane sapphire substrates are discussed.