[18p-S4_201-1~11] 3.6 Laser processing

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-S4_201-2] Feedback-Controlled Laser Polishing of Single-Crystal Diamond Using On-Machine White-Light Interferometry

〇Yuta Teshima¹, Reina Yoshizaki¹, Yanming Zhang¹, Shogo Kitamura¹, Yangjin Kim², Kenichi Hibino³, Naohiko Sugita¹ (1.Univ. Tokyo, 2.Pusan Univ., 3.AIST)

Keywords:

diamond,on-machine measurement,laser polishing

To address the issues of long processing times and environmental burden in diamond surface planarization, a feedback-based processing method using an ultrashort-pulse laser was proposed by integrating an on-machine white-light interferometric microscope with a laser processing system. By iteratively performing surface topography measurement, processing strategy determination, and laser irradiation, selective removal of surface protrusions on single-crystal diamond was achieved, demonstrating a reduction in the surface roughness Sa.