Presentation Information
[18p-S4_201-3]Processing parameter dependence and real-time imaging in femtosecond laser direct writing of sapphire
〇Eichi Terasawa1,2, Tatsunori Shibuya1,2, Hiroshi Ogawa1,2 (1.AIST IRCI, 2.AIST RIMA)
Keywords:
femtosecond laser direct writing,sapphire,real-time imaging
