Presentation Information

[18p-S4_201-3]Processing parameter dependence and real-time imaging in femtosecond laser direct writing of sapphire

〇Eichi Terasawa1,2, Tatsunori Shibuya1,2, Hiroshi Ogawa1,2 (1.AIST IRCI, 2.AIST RIMA)

Keywords:

femtosecond laser direct writing,sapphire,real-time imaging