[18p-WL1_201-1~7] Emerging research trends in thin-film materials, devices, and processes for future technological innovation

3:45 PM - 4:15 PM JST(6:45 AM - 7:15 AM UTC)

[18p-WL1_201-6] MEMS Vibrational Energy Harvester with Thin Film Potassium Ion Electret

〇Hiroaki Honma¹ (1.Kobe Univ.)

Keywords:

MEMS vibrational energy harvester,electret,IoT