[18p-WL1_201-1~7] Emerging research trends in thin-film materials, devices, and processes for future technological innovation

4:15 PM - 4:45 PM JST(7:15 AM - 7:45 AM UTC)

[18p-WL1_201-7] Integrated Chemical Sensors Based on Metal Oxide Nanochannel

〇Tsunaki Takahashi¹, Haruka Honda¹, Jiangyang Liu¹, Wataru Tanaka¹, Hosomi Takuro¹, Takeshi Yanagida¹ (1.The Univ. of Tokyo)

Keywords:

metal oxide,gas sensor,integrated sensor array