[2B07-13] Recent Trends in Vacuum Measurement Technology and National Standards of Pressure and Vacuum

2:00 PM - 2:30 PM JST(5:00 AM - 5:30 AM UTC)

[2B08] Role and Current Status of Optical Pressure Standards at NMIJ

*Yoshinori TAKEI¹, Hajime YOSHIDA¹, Souichi TELADA¹, Youichi Youichi¹ (1. AIST / NMIJ (Japan))

Vacuum measurements are essential in advanced industries such as semiconductor manufacturing, where precise pressure control impacts performance and yield. Capacitance diaphragm gauges (CDGs) are widely used and calibrated against national standards to ensure reliability. At NMIJ, vacuum standards provide calibration for vacuum pressure with small uncertainties. To improve accuracy near 100 Pa, optical pressure measurement systems has been developed using a Fabry–Pérot cavity. Key challenges include cavity deformation due to pressure and temperature. Mechanical effects are corrected by the two-gas method, and thermal effects are minimized using low-expansion materials. These advances are expected to improve calibration capability near 100 Pa by a factor of 50, enabling high-accuracy evaluation of advanced CDGs.

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