[2B07-13] Recent Trends in Vacuum Measurement Technology and National Standards of Pressure and Vacuum

2:30 PM - 3:00 PM JST(5:30 AM - 6:00 AM UTC)

[2B09] Development and calibration of sapphire diaphragm vacuum gauges: Azbil’s approach and future prospects

*Yuji Nonaka¹ (1. Azbil Corporation (Japan))

Accurate pressure measurement in high–temperature vacuum environments is essential for semiconductor manufacturing. We developed sapphire diaphragm vacuum gauges, including the V8C model with an integrated sensor and circuit and the V8S model with a separated sensor enabling operation up to 250 ℃. The capacitance–type sensor employs a sapphire diaphragm with electrodes on opposing surfaces, providing resistance to heat and corrosive gases. The sensor is operated at elevated temperature to suppress gas deposition and reduce measurement error. Calibration is based on an expansion system with a JCSS–certified range from 0.1 Pa to 133.32 kPa. At elevated temperatures, thermal transpiration causes pressure deviations between the gauge and the reference. We evaluated the uncertainty of this effect and identified optimal conditions, achieving a maximum deviation of 0.15% over the temperature range from 23 ℃ to 100 ℃.

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