[2B07-13] Recent Trends in Vacuum Measurement Technology and National Standards of Pressure and Vacuum

3:45 PM - 4:15 PM JST(6:45 AM - 7:15 AM UTC)

[2B11] A wide-range diaphragm gauge using a quartz oscillator: Q’z Gauge

*Masatoshi Ono¹, Hisao Hojoh¹, Hiroshi Miura¹, Makoto Okano¹, Hiroaki Tamai¹ (1. Q'z Co., Ltd. (Japan))

A wide-range diaphragm vacuum gauge, the Q'z Gauge (QDG), was developed using a quartz tuning-fork oscillator as a stress sensor. The oscillator is vertically bonded between two diaphragms, and pressure-induced deformation generates longitudinal stress that shifts its resonant frequency. Gas-type-independent pressure is obtained by processing the frequency shift with temperature compensation, using calibration coefficients individually derived for each sensor over 0.001–100 kPa and 15–45 °C. The basic model measures from 1 atm down to 0.01 Pa with an uncertainty of 0.004 Pa, and its performance is unaffected by gravity, ambient temperature, or humidity. Compared with a CDG, the QDG provides a wider measurement range without a protection valve, requires no thermal enclosure, and offers fast startup. Improved versions include the Q'z 1000 and two models designed for high-precision and ultrahigh-vacuum applications. The QDG is particularly effective in ALD and CVD processes.

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