[2B07-13] Recent Trends in Vacuum Measurement Technology and National Standards of Pressure and Vacuum

4:15 PM - 4:45 PM JST(7:15 AM - 7:45 AM UTC)

[2B12] Vacuum system integrity monitoring by AI microwave sensor : IRIS

*JungHoon Joo¹ (1. Kunsan National University (Korea))

Temporary

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