Presentation Information
[2B13]High-pecision vacuum measurement of base pressure and residual gas in XHV environment using 0.2% BeCu alloy technology.
*Shinsuke Kishikawa1, Masahide KUroiwa1, Masanao Sasaki1, Kaoru Wada1 (1. Tokyo Electronics Co., Ltd. (Japan))
(Summary)
The 0.2% BeCu alloy a vacuum structural material serving as an alternative to stainless steel, and its associated technologies were developed over many years by the late Mr. Fumio Watanabe of Vac Lab Ltd. We took over these technologies 10 years ago.I still clearly remember that the driving force behind this development was a strong determination to achieve an XHV level of E-13 Pa.In case of a system comprising a 0.2% BeCu alloy chamber and an XHV pumping setup featuring WATMASS, 3B Gauge and NEG pump (with a TMP for primary pumping) the entire BeCu alloy structure can be heated uniformly. Consequently, it is possible to reach an XHV level of E-10 Pa after baking at 200–250°C for approximately 5 hours cooling.
The 0.2% BeCu alloy a vacuum structural material serving as an alternative to stainless steel, and its associated technologies were developed over many years by the late Mr. Fumio Watanabe of Vac Lab Ltd. We took over these technologies 10 years ago.I still clearly remember that the driving force behind this development was a strong determination to achieve an XHV level of E-13 Pa.In case of a system comprising a 0.2% BeCu alloy chamber and an XHV pumping setup featuring WATMASS, 3B Gauge and NEG pump (with a TMP for primary pumping) the entire BeCu alloy structure can be heated uniformly. Consequently, it is possible to reach an XHV level of E-10 Pa after baking at 200–250°C for approximately 5 hours cooling.
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