LPM 17: Laser Drilling and Cutting 2

9:30 AM - 9:50 AM JST(12:30 AM - 12:50 AM UTC)

[22-04] Super-stealth dicing with nanometric precision

*Lei Wang¹, Zhen-Ze Li², Xin-Jing Zhao¹, Wei Gong¹, Qing Wang¹, Wei-Wei Xu³ (1. Jilin University (China), 2. Tsinghua University (China), 3. Jilin Engineering Normal University (China))

Keywords:

super-stealth dicing,O-FIB,Optical farfield-induced nearfield breakdown

C000260