Presentation Information
[48-03]Laser inscription in semiconductors by multiphoton-initiated nanosecond mid-infrared pulse absorption
*Pol Sopeña1, Niladri Ganguly1, Gabriel Spühler2, Andrei Selivanau2, David Grojo1 (1. Aix-Marseille University, CNRS, LP3 (France), 2. Glucoloop AG (Switzerland))
Keywords:
Laser processing,Semiconductor,Silicon,Germanium,Mid-infrared
C000023