LPM 36: Micro-machining

2:30 PM - 2:50 PM JST(5:30 AM - 5:50 AM UTC)

[48-04] High-Sensitivity Ultra-Thin Glass Cantilever Sensor Fabricated by Femtosecond Laser Processing

*Yaxiaer Yalikun^1,2, Yapeng Yuan³, Yang Yang³, Yoichiroh Hosokawa^1,2 (1. Division of Materials Science, NARA Institute of Science and Technology (Japan), 2. Medilux Research Center, NARA Institute of Science and Technology (Japan), 3. Institute of Deep-Sea Science and Engineering (China))

Keywords:

Femtosecond Laser Processing,Ultra-Thin Glass Sheet,High-Sensitivity Cantilever Sensor

C000271