Presentation Information
[Tu2-P31-13]Electrical properties manipulation of nanocrystalline silicon/silicon oxide composite films
*Kaori Takagi1, Asaki Arata2, Yasuyoshi Kurokawa2,3, Atsushi Masuda1,4, Noritaka Usami2,3,5, Kazuhiro Gotoh1,2,4 (1. Grad. Sch. Sci. Technol., Niigata Univ. (Japan), 2. Grad. Sch. Engr., Nagoya Univ. (Japan), 3. InFuS, Nagoya Univ. (Japan), 4. IRCNT, Niigata Univ. (Japan), 5. IMaSS, Nagoya Univ. (Japan))