Presentation Information
[Tu2-P31-14]High-Quality Tunnel Oxide Passivated Contact Fabricated Using Sputtered Amorphous Silicon and Spin-On Doping
*Shasha Li1, Koki Omori1, Yasushi Kawaguchi1, Noboru Yamaguchi1, Shinsuke Miyajima1 (1. Tokyo Institute of Technology (Japan))