Presentation Information
[Tu2-P31-16]Effect of TiOx layer thickness and LiF interlayer on the passivation
performance of TiOx/Si heterostructure
*Shohei Fukaya1, Kazuhiro Gotoh1,3,4, Hitoshi Sai2, Yasuyoshi Kurokawa1, Noritaka Usami1,5, Takuya Matsui2 (1. Graduate School of Engineering, Nagoya University (Japan), 2. National Institute of Advanced Industrial Science and Technology (Japan), 3. Graduate School of Science and Technology, Niigata University (Japan), 4. IRCNT, Niigata University (Japan), 5. InFuS, Nagoya University (Japan))