[Tu2-P31] Sub area 3-1 : Materials, Processes, Fundamentals

[Tu2-P31-19] ALD-TiOx and PVD-MoOx in dopant-free silicon heterojunction solar cells

*Liqi Cao¹, Roel Theeuwes², Yifeng Zhao¹, Paul Procel¹, Erwin Kessels², Miro Zeman¹, Luana Mazzarella¹, Olindo Isabella1¹ (1. Delft University of Technology (Netherlands), 2. Eindhoven University of Technology (Netherlands))