[Tu2-P31] Sub area 3-1 : Materials, Processes, Fundamentals

[Tu2-P31-23] Investigation of deposition conditions for multilayer passivation thin filmsusing Bayesian optimization with hydrogen concentration as an index

*Soma Kondo¹, Yasuyoshi Kurokawa^1,2, Kazuhiro Gotoh^3,4, Kentaro Kutukake^1,5, Noritaka Usami^1,2,5 (1. Grad. Sch Eng, Nagoya Univ (Japan), 2. InFuS,Nagoya Univ (Japan), 3. Grad. Sch Sci. Technol,Niigata Univ (Japan), 4. IRCNT,Niigata Univ (Japan), 5. IMass, Nagoya Univ (Japan))