Presentation Information
[Tu2-P31-36]Effect of pre-oxidation parameters on Al-Ge screen printed silicon substrates for improved SiGe layer growth
*Taruna Teja Jupalli1, Shota Suzuki2, Sarah Alamri1, Yuqing Li 1, Kaito Kitaura1, Moeko Matsubara2, Hideaki Minamiyama2, Marwan Dhamrin1,2 (1. Graduate School of Engineering, Osaka University (Japan), 2. Toyo Aluminium K.K (Japan))