[C-10] 電子デバイス

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[C-10-01] Evaluation of SiC pn diodes fabricated by CO₂ laser impurity doping

〇Akihiro Ikeda¹, Yasushi Kodama², Kazuyuki Yoneya² (1. Sojo Univ., 2. SEIDENSHA Electronics Co., Ltd.)

Keywords:

laser doping,SiC,pn diode