Presentation Information

[C-10-01]Evaluation of SiC pn diodes fabricated by CO2 laser impurity doping

〇Akihiro Ikeda1, Yasushi Kodama2, Kazuyuki Yoneya2 (1. Sojo Univ., 2. SEIDENSHA Electronics Co., Ltd.)

Keywords:

laser doping,SiC,pn diode