Presentation Information
[PS-11-05]Robust Spectroscopic Ellipsometry for Nanoscale Oxide Multilayer Characterization
〇Rogie Maghinay Madula1, Kazunori Iwamitsu2, Takanori Takahashi2, Zentaro Akase4, Yukiharu Uraoka3, Shigetaka Tomiya3 (1. PhD Student (Japan), 2. Assistant Professor (Japan), 3. Professor (Japan), 4. Associate Professor (Japan))