[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

1:32 PM - 1:34 PM JST(4:32 AM - 4:34 AM UTC)

[SO-PS-01-02 (Late News)] Fabrication and evaluation of Metal/n⁺-Ge Contacts with Extremely Low Contact Resistivity

〇Yajun Feng¹, Chia-Yuan Kao¹, Chao-Ching Cheng², Iuliana Radu², Guang-Li Luo³, Keisuke Yamamoto^4,5, Dong Wang^1,5 (1. IGSES, Kyushu Univ. (Japan), 2. Corp. Res., TSMC (Taiwan), 3. TSRI, NIAR (Taiwan), 4. REISI, Kumamoto Univ. (Japan), 5. FES, Kyushu Univ. (Japan))