[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

1:34 PM - 1:36 PM JST(4:34 AM - 4:36 AM UTC)

[SO-PS-01-03] High-Performance NC-RFGAAFETs Utilizing Hf_0.3Zr_0.7O₂ Superlattice Dielectric for Low Power Cryogenic Application

〇Chia-Yi Lin¹, Cheng-Yueh Cheng¹, Yueh-Chun Wu¹, Chao-Wei Wu¹, Hsin-Hui Hu², Yung-Chun Wu¹ (1. National Tsing Hua Univ. (Taiwan), 2. National Taipei Univ. of Technology (Taiwan))