[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

1:40 PM - 1:42 PM JST(4:40 AM - 4:42 AM UTC)

[SO-PS-01-06 (Late News)] Performance Evaluation of Unmerged Source/Drain Epitaxy in 7-angstrom node monolithic complementary field-effect transistors

〇SANGUK LEE¹, Sheng Yang², Halil Kükner², Lynn Verschueren², Jürgen Bömmels², Geert Eneman², Fabian M Bufler², Maarten Van de Put², Anita Farokhnejad², Geert Hellings², Rock-Hyun Baek¹ (1. POSTECH (Korea), 2. IMEC (Belgium))