[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

1:40 PM - 1:42 PM JST(4:40 AM - 4:42 AM UTC)

[SO-PS-01-06] Process Driven Optimization of Channel Strain Retention in Vertically Stacked CFETs

Sumant Sarkar¹, 〇Timothy Yang², Tom Mountsier¹, Benjamin Vincent³ (1. Lam Research, USA (USA), 2. Lam Research, Japan (Japan), 3. Lam Research, France (France))