[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

1:42 PM - 1:44 PM JST(4:42 AM - 4:44 AM UTC)

[SO-PS-01-07] Mechanical Stability and Adhesion of Nanosheets under Capillary Forces during the Wet Processes in Gate-all-around FETs Fabrication

〇Kenzo Manabe¹, Chia-Tsong Chen¹, Toshihiro Narushima¹, Ryutaro Nishino¹, Toshifumi Irisawa¹, Yoshihiro Hayashi¹ (1. National Inst. of Advanced Indus. Sci. and Tech. (Japan))