Presentation Information

[SO-PS-11-03]Improved Carrier Mobility of Ultra-Thin Sn-Doped Poly-Ge Films by Thinning with Dry Etching and Post-Annealing

〇Hongbo Shan1, Takuto Watanabe1, Takashi Kajiwara1, Taizoh Sadoh1 (1. Kyushu Univ. (Japan))