[SO-PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

1:44 PM - 1:46 PM JST(4:44 AM - 4:46 AM UTC)

[SO-PS-11-08] In-Situ Stabilization of Ultra-High-κ Oriented c/t-ZrO₂ via Atomic Layer Annealing for BEOL-Compatible Applications

〇Yu-Che Huang¹, Chih-Sheng Hsu¹, Yen-Fa Liao², Shu-Chih Haw², Shu-Jui Chang¹, Edward Yi Chang¹ (1. National Yang Ming Chiao Tung University, Hsinchu (Taiwan), 2. National Synchrotron Radiation Research Center, Hsinchu (Taiwan))