講演情報
[17p-WL2_401-6]High-Efficiency Vertical Coupler between Si and Low-index (~1.6) SiON Waveguide with Low Polarization Dependance Loss
〇Haoyu Chen1, Moataz Eissa1, Kaibin Yao1, Tsuyoshi Horikawa1, Keisuke Kawahara1, Nobuhiko Nishiyama1,2,3 (1.Science Tokyo, 2.NEX-SECC, 3.PETRA)
キーワード：
Layer-to-Layer Coupler