講演情報

[18a-M_103-9]Measurement of Temporal Evolution of Laser Produced Plasma Using a Dispersion Interferometer

〇(D)Xin Jin1, Naoya Yoshihara1, Kenji Tanaka1,2, Chihiro Suzuki2 (1.Kyushu University, 2.NIFS)

キーワード:

EUV、Dispersion Interferometor、Laser produced plasma

Research on Laser produced plasma (LPP) to achieve higher efficient extreme ultraviolet (EUV) has attracted great attention in recent years. To enhance EUV yield, there is a need to diagnose plasma conditions — including electron density, temperature, and charge state distribution. In contrast to Thomson scattering[, dispersion interferometer (DI) with continuous-wave (CW) laser is effective in capturing nanosecond time-resolved information of electron density.
In DI, a laser beam is incident into nonlinear crystals, where the second harmonics are generated before and after passing through the plasma. The wedge is used for calibration and initial phase adjustment. The filter blocks the fundamental wave. The detector detects the interference of the two second harmonics.
We are developing DI for the measurements of temporal evolution of electron density of LPP.
This presentation reports our recent results of the LPP measurements of tungsten using a DI.