Presentation Information
[[PA]-2am-03]Prediction of Resin Chemical Resistance Using a Multitask Machine Learning Model for Application in Semiconductor Cleaning Equipment
○Mitsuru Yambe1, Shogo Kunieda1, Takeru Nakamura1, Yosuke Hanawa1, Hitoshi Kamijima2, Toshiaki Shintani2, Takuma Mitamura2, Yoshihiro Hayashi3, Ryo Yoshida3 (1. SCREEN Holdings Co., Ltd., 2. Research Institute of Systems Planning. Inc., 3. The Institute of Statistical Mathematics)
Keywords:
Resin Materials,Organic Solvent,Chemical Resistance,Machine Learning