IWDTF2025

Sponsored by The Japan Society of Applied Physics 
Co-sponsored by JSAP Thin Film and Surface Physics Division 
Endorsed by JSAP Silicon Technology Division / IEEE EDS Japan Chapter / IEICE Electronics Society

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SCOPE:

The 2025 International Workshop on “Dielectric Thin Films for Future Electron Devices: Science and Technology” (IWDTF2025) will be held at the Sendai City War Reconstruction Memorial Hall in Sendai, Japan, from November 5th to 7th, 2025. The IWDTF started in 1999, based on a domestic annual workshop on ultrathin silicon dioxide films. The IWDTF2025 is the twelfth workshop, which will focus on the science and technologies of dielectric films for electron devices, such as ultrathin dielectrics, high-k dielectrics, and ferroelectrics. In addition to the papers on materials and processes of dielectrics for conventional logic devices, the papers for various electron devices including memory, power, analog, sensor, and display devices are welcomed. The IWDTF will provide a great opportunity for information exchange and discussion at the forefront of the research on future electron devices. The papers on both experimental and theoretical studies, for a deep understanding of the properties of dielectric films and their interfaces, are welcomed. The workshop will consist of invited and contributed talks. Selected topics of current interests will be reviewed by several invited talks.

Papers are solicited in, but not limited to, the following area:

• Electron device application of dielectric thin films
• Material design of dielectric thin films
• Growth and related process of dielectric thin films
• Characterization and control of dielectrics, dielectrics surfaces, and dielectrics interfaces
• Electrical characterization of dielectrics, dielectrics surfaces, and dielectrics interfaces
• Surface preparation and cleaning issues for dielectrics
• Dielectric wear out and reliability
• Dielectric reliability related to process integration
• Surface passivation technology
• Theoretical approaches to dielectrics, dielectrics surfaces, and dielectrics interfaces

IMPORTANT DATES: 

Abstract deadline: August 22, 2025 

Notification of acceptance: By September 30, 2025 

Workshop: November 5-7, 2025 

Full paper (JJAP) deadline: December 18, 2025 (tentative)