Thermal Oxidation Mechanism & 2D Materials(9:00 AM - 10:40 AM JST)
[S5]
Chair:Takanobu Watanabe(Waseda University), Koji Kita(The University of Tokyo)
Simulation & Characterization
Focus Session(10:55 AM - 11:55 AM JST)
[FB]
Chair:Akio Ohta(Fukuoka University), Takezo Mawaki(Tohoku University)
Electrically / Physicaly Characterization
Power Device & Processes(1:30 PM - 3:10 PM JST)
[S6]
Chair:Motoyuki Sato(Tokyo Electron), Toshinori Numata(Toyota Technological Institute)
Electron device, process, and characterization
Power Device & Processes(3:25 PM - 4:25 PM JST)
[S7]
Chair:Motoyuki Sato(Tokyo Electron), Toshinori Numata(Toyota Technological Institute)
Electron device, process, and characterization
Closing(4:25 PM - 4:50 PM JST)
[CS]
Chair:Masao Inoue(Renesas Electronics), Mitsuru Sometani(National Institute of Advanced Industrial Science and Technology (AIST))