[Session 4] Ultrasonic Technologies 1

3:20 PM - 3:35 PM JST(6:20 AM - 6:35 AM UTC)

[2R116] Non-contact Holding and Rotation of Φ300 Wafers Using the Ultrasonic Squeeze Film Levitation

Takumi Miyawaki¹, Masaaki Miyatake¹, Kazumi Haga², Yoshihiro Ishiguro² (1. Tokyo University of Science, Tokyo, Japan, 2. NanoSystem Solutions, Inc., Okinawa, Japan)

Keywords:

Squeeze Effect,Ultrasonic Vibration,Φ300 Wafers,Non-contact handling,Non-contact rotating