[Session 5] Thin film 1

4:35 PM - 4:55 PM JST(7:35 AM - 7:55 AM UTC)Invited Talk

[2R219] Understanding Structure-Property Relationships in Sc-Based Nitrides Contributing to High-Performance Devices

Masato Uehara¹ (1. National Institute of Advanced Industrial Science and Technology (AIST))

Keywords:

nitride,scandium,piezoelectricity,thin film,sputtering