[Poster session] Poster session (core time)

[3P110] Sputtering Deposition of Epitaxial PMN-PT Thin Films on Si

SHIBO GONG¹, Xiaochuan Sun¹, Jingwei He¹, SangHyo Kweon¹, Isaku Kanno¹ (1. Kobe University)

Keywords:

PMN-PT,Thin film,Piezoelectirc