[Session 9] Multiferroic and Composite Sensors / Actuators & MEMS Devices (Actuators and Sensors)

11:25 AM - 11:40 AM JST(2:25 AM - 2:40 AM UTC)

[4R108] Model-Based Design of a Piezoelectric Microtransducer for a Co-Resonant Nano-Mass Spectrometer

Willi Ron¹, Xiao Xiao², Nynne Britt Edeler², Raphael Hasterok¹, Felix Herrmann³, Stefan Zimmermann³, Marc Christopher Wurz², Jens Twiefel¹ (1. Leibniz University Hannover, Institute of Dynamics and Vibration Research, 2. Leibniz University Hannover, Institute of Micro Production Technology, 3. Leibniz University Hannover, Institute of Electrical Engineering and Measurement Technology)

Keywords:

Nano-mass spectrometer,Co-resonant transducer,Model-based design,Model reduction