Presentation Information

[19a-A202-4]Tuning conditions for CVD synthesis of h-BN nanosheets on Si substrates

〇(M1)Tomohiro Okamoto1, Toshiya Okabe1, Kentaro Watanabe1,2 (1.Shinshu Univ., 2.Shinshu Univ. IFES)

Keywords:

h-BN,CVD