[19a-A301-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[19a-A301-10] Ultra-high concentration p⁺n junctions by excimer laser doping

〇ren aoki¹, Keita Katayama¹, Daisuke Nakamura¹, Hisato Yabuta¹, Hiroshi Ikenoue¹, Taizoh Sadoh¹ (1.Kyushu Univ.)

Keywords:

semiconductor