Presentation Information

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[19a-A301-6]Linear agglomeration during the CW-laser lateral crystallization of Si films (2)

〇Nobuo Sasaki^1,2, Satoshi Takayama², Rikuto Sasai², Yukiharu Uraoka² (1.Sasaki Consulting, 2.NAIST)

Keywords:

cw laser crystallization,TFT,agglomeration

Linear agglomerations are accidentally generated by the cw laser lateral crystallization of a-Si for the higher laser power than the optimum conditions. The in-situ observations of the generations are performed with a high-speed movie camera.

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