[19a-A601-1~9] 7.1 X-ray technologies

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[19a-A601-2] Development of Narrowband Multilayer Mirrors for Extracting a Single Harmonic from an EUV HHG Source

〇Yuya Iwamoto¹, Suet Yi Liu¹, Hiroki Mashiko², Satoshi Ichimaru², Masatoshi Hatayama², Eric Gullikson⁴, Tomoya Mizuno³, Takayuki Kurihara³, Jiro Itatani³, Hisataka Takenaka¹ (1.TOYAMA Co. Ltd., 2.NTT Advanced Technology Co., 3.Univ. of Tokyo, 4.LBNL)

Keywords:

EUV,multilayer,HHG

We developed a Y/AlSi multilayer mirror with narrowband performance in order to extract a pure single harmonic from HHG (High Harmonic Generation). The measured peak reflectance of Y/AlSi multilayer is 43% at 64 eV (FWHM 1.7 eV). Compare to another EUV multilayer mirror (Zr/AlSi), our results show that the Y/AlSi multilayer mirror can better suppress adjacent harmonic lines while still having sufficient reflectivity for the selected single harmonic.