[19a-B201-1~9] 15.7 Crystal characterization, impurities and crystal defects

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[19a-B201-3] Numerical analysis of convection of CZ-Ga₂O₃ grown by skull melting method

〇Koichi Kakimoto¹, Isao Takahashi², Taketoshi Tomida¹, Vladimir Kochurikhin¹, Kei Kamada^1,2, Satoshi Nakano³, Akira Yoshikawa^1,2,4 (1.NICHe, Tohoku Univ., 2.C & A, 3.RIAM, Kyushu Univ., 4.IMR, Tohoku)

Keywords:

semiconductor,Ga2O3,Skull melting

We carried out numerical analysis of dislocation density in Ga₂O₃ grown by Skull melting method with Czochralski configuration. Coil position affected on temperature distribution in the melt as well as shape of solid/liquid interface.